English

DTIC ADA112062: Microelectronics Failure Analysis Techniques. A Procedural Guide

The objective of this procedural guide was not to present an expose of device failure modes/mechanisms and applicable techniques for detection, identification and measurement but rather to provide a treatise on proven failure analysis techniques, equipment, procedures and expected analytical results. The guide thus represents a compilation and description of practical semiconductor failure analysis techniques rather than failure analysis flow sequences for verifying specific device failure mechanisms.

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